MEMS Alliance Spring 2005 Workshop

The Post Telecommunication Boom

    18-19 April 2005

April 18th

 

10:00 – 4:00 MEMSCAP sponsored MUMPs¨ User Group Meeting

all MEMS ALLIANCE  attendees welcome, Lunch is included

TOPICS PRESENTED

¥       Why Standard Processes?

¥       Technical Overview of MUMPs¨

¥       Presentation of MUMPs Reference Material

¥       CMOS-MEMS Through ASIMPS

¥       MUMPs-PLUS: Semi-Custom Processing

¥       MUMPs¨ at JHU APL

4:00-7:00 MEMS ALLIANCE MID ATLANTIC Reception and Poster Session (registration open)

 

April 19th

 

8:30-8:45 Greetings and Welcome

 

8:45 – 9:30 (Keynote) ÒMEMS and the Telcon Bubble,Ó Dr. Richard Payne: Vice President of Engineering and Manufacturing, Polychromix,


 9:30-10-15 (Invited) ÒMEMS in Wireless Applications,Ó Dr. David Nagel, George Washington University,

 

10:15-10:30 Break

 

10:30-10:55 ÒA MEMS Capacitive Shunt Switch with a Finite GroundÓ, Dr. Jeyasingh Nithianandam, Morgan State University

 

10:55-11:20 ÒA MEMS Electron Gun with Carbon Nanotube EmittersÓ, Dr. Brian Jamieson, NASA GSFC

 

11:20-11:45 ÒMulti- and Single-layer Structure network adaptable and CMOS compatible SAW Sensor: Characterization and simulationsÓ, F. Hassani and M. Rahaman, The George Washington University

 

11:45-12:30 (Invited) ÒInteractions of light with nanostructured MEMS for physical sensing,Ó Dr. Dustin Carr, Sandia National Laboratories

 

12:30-1:30 Lunch 

 

1:30-2:15 (Invited) ÒProbing the Micro WorldÓ, Dr. Beth Pruitt, Stanford University

 

2:15-3:00 (Invited) ÒMEMS - new paradigm in research labs: from Biology to Materials Science,Ó Dr.  Taher Saif, University of Illinois

 

3:00-3:50 Poster Session

 

3:50-4:15 ÒDesign and Characterization of CMOS Surface Acoustic Wave Resonator: with telecommunication and sensor applications,Ó Anis Nurashikin Nordin, The George Washington University

 

4:15-4:40 ÒMicrofabrication of Ultra-Sensitive Quartz Crystal Microbalance (QCM) Using Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) for Sensor ApplicationsÓ, A. Goyal, Penn State University

 

4:40-5:05  ÒMEMS Nanopositioning Mechanisms: Design and Experimental CharacterizationÓ, Jason J. Gorman, National Institute of Standards and Technology